Microscopic ESPI: better fringe qualities by the Fourier transform method

Akram El Jarad; Gerd Gulker; Klaus D. Hinsch

doi:10.1117/12.516662

27 May 2003 Microscopic ESPI: better fringe qualities by the Fourier transform method

Akram El Jarad, Gerd Gulker, Klaus D. Hinsch

Proceedings Volume 4933, Speckle Metrology 2003; (2003) https://doi.org/10.1117/12.516662
Event: Speckle Metrology 2003, 2003, Trondheim, Norway

Abstract

Electronic speckle pattern interferometry (ESPI) is discussed for the detection of out-of-plane deformations in small objects. For increasing the resolution in object space a laser source of small wavelength is combined with a microscope with a high numerical aperture. Fringe quality is increased by using spatial phase-shifting and the Fourier transform method to allow deformation detection also under non-optimum conditions. The efficacy will be shown in some measurements on different specimens where deformations are successfully recorded in areas down to a few micrometers in size.

Citation Download Citation

Akram El Jarad, Gerd Gulker, and Klaus D. Hinsch "Microscopic ESPI: better fringe qualities by the Fourier transform method", Proc. SPIE 4933, Speckle Metrology 2003, (27 May 2003); https://doi.org/10.1117/12.516662

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