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27 May 2003 Promise and challenge of DUV speckle interferometry
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Proceedings Volume 4933, Speckle Metrology 2003; (2003)
Event: Speckle Metrology 2003, 2003, Trondheim, Norway
The paper explains the benefits and the application limits of micro speckle interferometry (MSI) and it shows the potential for improvements when a deep UV laser source is used. For the experiments, a new deep ultraviolet micro speckle interferometer (DUV-MSI) was designed operating at 266 nm of wavelength. The implemented optics enables for the measurement of both, in-plane and out-of-plane movements on the microparts. A number of practical examples are shown in the paper in order to illustrate the advantages of a shorter wavelength in speckle interferometry.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Petra Aswendt "Promise and challenge of DUV speckle interferometry", Proc. SPIE 4933, Speckle Metrology 2003, (27 May 2003);

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