Electrical and mechanical properties of PZT thin films prepared by hybrid process of sol-gel technique and laser ablation

Lulu Zhang; Masaaki Ichiki; Zhanjie Wang; Ryutaro Maeda

doi:10.1117/12.469049

13 November 2002 Electrical and mechanical properties of PZT thin films prepared by hybrid process of sol-gel technique and laser ablation

Lulu Zhang, Masaaki Ichiki, Zhanjie Wang, Ryutaro Maeda

Author Affiliations +

Proceedings Volume 4934, Smart Materials II; (2002) https://doi.org/10.1117/12.469049
Event: SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, 2002, Melbourne, Australia

Abstract

To prepare lead zirconate titanate (Pb(Zr_xTi_1-x)O₃): PZT) thin films at a higher deposition rate and a lower substrate temperature, the PZT films were fabricated by a hybrid process of sol-gel technique and pulsed laser ablation deposition. First, one layer of PZT (about 0.12-0.14 μm) was coated on Si/SiO₂/Ti/Pt substrate by sol-gel process. Then PZT film was deposited at a rate of 0.7 μm/hr by pulsed excimer laser-ablation on the substrate with one sol-gel derived PZT seed layer. A target of Pb(Zr_0.52Ti_0.48)O3 with 20 wt% excess PbO was used. The substrate temperature was about 500 °C. The film fabricated by the hybrid process showed the perovskite PZT phase without pyrochlore phase. The dielectric constant measured at 1 kHz was approximately 1580. The saturation polarization, remnant polarization and coercive field of 0.8 μm thick film were about 46.6 μC/cm², 24.5 μC/cm² and 36.4 kV/cm, respectively. The residual stresses in the thin film stacks were measured by the changes in the radius of curvature of the wafer. A relatively lower tensile stress (approximately 33 MPa) was obtained compared to the sol-gel derived PZT film. Therefore, the PZT films with good electrical and mechanical properties can be fabricated by using the hybrid process of the sol-gel technique and laser ablation.

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Lulu Zhang, Masaaki Ichiki, Zhanjie Wang, and Ryutaro Maeda "Electrical and mechanical properties of PZT thin films prepared by hybrid process of sol-gel technique and laser ablation", Proc. SPIE 4934, Smart Materials II, (13 November 2002); https://doi.org/10.1117/12.469049

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