High-responsiveness and high-power Fe-Pd magnetostrictive films prepared by magnetron sputtering

Hiromasa Yabe; Haru-Hisa Uchida; Yoshihito Matsumura; Hirohisa Uchida; Yoshitake Nishi

doi:10.1117/12.471963

13 November 2002 High-responsiveness and high-power Fe-Pd magnetostrictive films prepared by magnetron sputtering

Hiromasa Yabe, Haru-Hisa Uchida, Yoshihito Matsumura, Hirohisa Uchida, Yoshitake Nishi

Proceedings Volume 4934, Smart Materials II; (2002) https://doi.org/10.1117/12.471963
Event: SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, 2002, Melbourne, Australia

Abstract

New high responsive Fe-Pd magnetostrictive films with high power were developed and prepared by magnetron sputtering. The in-plane magnetization of Fe-Pd thin film was larger than that of the Tb_0.3Dy_0.7Fe₂ alloy film. The Fe-Pd magnetostrictive films show large magnetostriction and high magnetostrictive susceptibility at low magnetic field from earth magnetic field to 1 kOe. The high magnetostrictive susceptibility of the Fe-Pd alloy films obtained was appropriate as a remote actuator in low magnetic field. If an ideal Fe-Pd magnetostrictive films are developed to apply the micro-machine, offering the advantages of low cost, lightweight and relatively simple design. In order to apply these properties to a practical actuator, load dependence of magnetostrictive susceptibility was serious potential problems. In this study, the magnetostrictive susceptibility changes were measured under different loading stresses. As a result, Fe-Pd alloy film showed high magnetostrictive susceptibility under high film loading stress above 50 MPa.

Citation Download Citation

Hiromasa Yabe, Haru-Hisa Uchida, Yoshihito Matsumura, Hirohisa Uchida, and Yoshitake Nishi "High-responsiveness and high-power Fe-Pd magnetostrictive films prepared by magnetron sputtering", Proc. SPIE 4934, Smart Materials II, (13 November 2002); https://doi.org/10.1117/12.471963

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