14 November 2002 Analytical modeling of the electromechanical coupling of cantilever beams
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Abstract
The coupled interaction between the mechanical deflection of a cantilever beam and an applied electrostatic field is a non-linear problem. A simple and efficient model is desirable in the initial design phase of MEMS structures. A new analytical model is developed which is versatile and applicable to complex cantilever structures. The model is verified and compared to current analytical approaches and Coventorware. The model is used to examine the novel electromechanical properties of double cantilever beams. Double cantilever beams exhibit a minimum pull-in voltage when the overlap distance between the beams is one half the length of the beams. This result has application to tunable micro-cantilever switches, and the geometrical relationship of the cantilever beam to dynamic range of the switching voltage is discussed.
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Jason P. Chaffey, Mike Austin, "Analytical modeling of the electromechanical coupling of cantilever beams", Proc. SPIE 4935, Smart Structures, Devices, and Systems, (14 November 2002); doi: 10.1117/12.469085; https://doi.org/10.1117/12.469085
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