14 November 2002 Design and fabrication of an analog ASIC interfacing a μ-resonant capacitive MEMS sensor in a high-temperature environment (200°C)
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Abstract
This paper is dedicated to an electronic oscillator designed to control a MEMS (Micro-Electro-Mechanical System) sensor based on a clamped-clamped silicon micro-beam resonator. Due to the high-temperature environment (200°C) and the MEMS specificities, a specific architecture (MRC transimpedance) was implemented in a standard CMOS technology to improve the robustness and to enable the compensation of drifts due to the technologies used for both the sensor and the ASIC. Particular attention is given to the transimpedance first stage of the oscillator. In this paper and after a brief description of the entire oscillator, experimental results are given to demonstrate the capability of the designed ASIC.
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Olivier Robert, Olivier Gigan, Hua Chen, Gilles Amendola, "Design and fabrication of an analog ASIC interfacing a μ-resonant capacitive MEMS sensor in a high-temperature environment (200°C)", Proc. SPIE 4935, Smart Structures, Devices, and Systems, (14 November 2002); doi: 10.1117/12.469399; https://doi.org/10.1117/12.469399
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