Design and fabrication of an analog ASIC interfacing a <micron>-resonant capacitive MEMS sensor in a high-temperature environment (200 degrees C)

Olivier Robert; Olivier Gigan; Hua Chen; Gilles Amendola

doi:10.1117/12.469399

14 November 2002 Design and fabrication of an analog ASIC interfacing a μ-resonant capacitive MEMS sensor in a high-temperature environment (200°C)

Olivier Robert, Olivier Gigan, Hua Chen, Gilles Amendola

Author Affiliations +

Proceedings Volume 4935, Smart Structures, Devices, and Systems; (2002) https://doi.org/10.1117/12.469399
Event: SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, 2002, Melbourne, Australia

Abstract

This paper is dedicated to an electronic oscillator designed to control a MEMS (Micro-Electro-Mechanical System) sensor based on a clamped-clamped silicon micro-beam resonator. Due to the high-temperature environment (200°C) and the MEMS specificities, a specific architecture (MRC transimpedance) was implemented in a standard CMOS technology to improve the robustness and to enable the compensation of drifts due to the technologies used for both the sensor and the ASIC. Particular attention is given to the transimpedance first stage of the oscillator. In this paper and after a brief description of the entire oscillator, experimental results are given to demonstrate the capability of the designed ASIC.

Citation Download Citation

Olivier Robert, Olivier Gigan, Hua Chen, and Gilles Amendola "Design and fabrication of an analog ASIC interfacing a μ-resonant capacitive MEMS sensor in a high-temperature environment (200°C)", Proc. SPIE 4935, Smart Structures, Devices, and Systems, (14 November 2002); https://doi.org/10.1117/12.469399

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available