14 November 2002 Finite-element analysis for simulation of layered SAW devices with XY LiNbO3 substrate
Author Affiliations +
Abstract
A finite-element method is employed to model layered Surface Acoustic Wave (SAW) two port delay lines, with a zinc oxide (ZnO) thin film guiding layer. The structure is based on x-cut, y-propagating LiNbO3 substrate. Conditions that model the realistic electrical and mechanical boundary values are applied to the structure to analyze the electromechanical properties of the SAW device. Transient analyses are performed and the frequency responses are calculated using the FFT. Simulation results show good agreement with experimental results, indicating that a finite-element method is an appropriate approach for modeling layered SAW devices.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Samuel James Ippolito, Kourosh Kalantar-zadeh, Wojtek Wlodarski, David Powell, "Finite-element analysis for simulation of layered SAW devices with XY LiNbO3 substrate", Proc. SPIE 4935, Smart Structures, Devices, and Systems, (14 November 2002); doi: 10.1117/12.469080; https://doi.org/10.1117/12.469080
PROCEEDINGS
12 PAGES


SHARE
Back to Top