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14 November 2002 In-plane micro-optical modulator for narrow bandwidth applications
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Abstract
The development of an optical modulator that can be integrated directly with different types of MEMS sensors and multiplexed onto a single optical fibre network will provide an improved functionality over current optical interfacing techniques. Narrow bandwidth modulators are required for linear sensor arrays to allow rapid connection of sensors, such as MEMS inertial sensors, with relative ease and low insertion loss to an optical network. A new MOEMS Fabry-Perot modulator fabricated using bulk micromachining is proposed. The modulator has been developed to reduce the alignment and packaging restrictions, the complexity and weight of a large sensor system. The modulator allows multiple sensors to be connected to the same optical fibre. Analytical and experimental results of the optical characteristics of the modulator are compared to current MEMS modulators and the fabrication constraints of the modulator are described.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jason P. Chaffey, Michael W. Austin, and Igor C. Switala "In-plane micro-optical modulator for narrow bandwidth applications", Proc. SPIE 4935, Smart Structures, Devices, and Systems, (14 November 2002); https://doi.org/10.1117/12.469084
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