Translator Disclaimer
14 November 2002 Large amplitude effects on the resonant frequency of electrostatically driven microresonators: theory and experimental validation
Author Affiliations +
Abstract
This paper is dedicated to a global study of large amplitude effects of electrostatically driven microresonators. Special attention is given to the electrostatic soft spring effect. A theoretical description of the amplitude-induced soft spring effect is given to an electrostatically driven parallel-plate type resonator. A coefficient representing the beam mode shape is introduced, for a clamped-clamped beam resonator. Electrostatic soft spring effect is combined with hard spring effect to highlight the possibility of obtaining a design criteria for compensating the two effects. Hysterisis due to nonlinear forces are addressed, and a critical amplitude is given. A numeric simulator based on MATLAB/Simulink is developed to highlight the electrostatic soft spring effect. Three prototypes with different geometries, which represent each a typical case, are fabricated on an SOI wafer. The design criteria has been compared with measurements obtained with prototypes and experimental results showed good agreements with theory and simulations.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hua Chen, Olivier Francais, Olivier Gigan, and Olivier Robert "Large amplitude effects on the resonant frequency of electrostatically driven microresonators: theory and experimental validation", Proc. SPIE 4935, Smart Structures, Devices, and Systems, (14 November 2002); https://doi.org/10.1117/12.469407
PROCEEDINGS
12 PAGES


SHARE
Advertisement
Advertisement
Back to Top