Simulation of excimer laser micromachined 3D surface using a CAD solid modeling package

Richard G. Hume; Pio G. Iovenitti; Jason P Hayes; Erol C. Harvey

doi:10.1117/12.469413

14 November 2002 Simulation of excimer laser micromachined 3D surface using a CAD solid modeling package

Richard G. Hume, Pio G. Iovenitti, Jason P Hayes, Erol C. Harvey

Proceedings Volume 4935, Smart Structures, Devices, and Systems; (2002) https://doi.org/10.1117/12.469413
Event: SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, 2002, Melbourne, Australia

Abstract

This paper describes the research on the development of a visualisation tool to generate 3D solid models of structures produced by micromachining using an excimer laser system. Currently, the development of part programs to achieve a desired microstructure is by a trial and error approach. This simulation tool assists designers and excimer machine programmers to produce microstructures using the excimer laser. Users can develop their microstructures and part programs with the assistance of digital prototypes rather than designing products using expensive laser micromachining equipment. The methods to simulate micromachining using the solid modelling package, SolidWorks, are described, and simulation and actual machined examples are reported. A basic knowledge of the solid modelling package is required to develop the simulations, and complex models take time to prepare, however, the development time can be minimised by working from previous simulations. The models developed can be parameterised so that families of designs can be investigated for little additional effort to optimise the design before committing to laser micromachining.

Citation Download Citation

Richard G. Hume, Pio G. Iovenitti, Jason P Hayes, and Erol C. Harvey "Simulation of excimer laser micromachined 3D surface using a CAD solid modeling package", Proc. SPIE 4935, Smart Structures, Devices, and Systems, (14 November 2002); https://doi.org/10.1117/12.469413

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