PROCEEDINGS VOLUME 4936
SPIE'S INTERNATIONAL SYMPOSIUM ON SMART MATERIALS, NANO-, AND MICRO- SMART SYSTEMS | 16-18 DECEMBER 2002
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
IN THIS VOLUME

14 Sessions, 57 Papers, 0 Presentations
Sensors  (2)
Actuators  (5)
Materials  (5)
Optical MEMS  (2)
Fluidic MEMS  (1)
Measurement  (2)
SPIE'S INTERNATIONAL SYMPOSIUM ON SMART MATERIALS, NANO-, AND MICRO- SMART SYSTEMS
16-18 December 2002
Melbourne, Australia
Poster Session
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 293 (13 November 2002); doi: 10.1117/12.469429
Sensors
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 194 (13 November 2002); doi: 10.1117/12.469740
Actuators
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 205 (13 November 2002); doi: 10.1117/12.476102
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 215 (13 November 2002); doi: 10.1117/12.469675
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 225 (13 November 2002); doi: 10.1117/12.469669
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 234 (13 November 2002); doi: 10.1117/12.471922
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 241 (13 November 2002); doi: 10.1117/12.469423
Nanotechnology III
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 35 (13 November 2002); doi: 10.1117/12.469745
Materials
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 252 (13 November 2002); doi: 10.1117/12.469742
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 260 (13 November 2002); doi: 10.1117/12.469680
Post-Deadline Papers
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 403 (13 November 2002); doi: 10.1117/12.471925
Materials
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 277 (13 November 2002); doi: 10.1117/12.476100
Optical MEMS
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 76 (13 November 2002); doi: 10.1117/12.469670
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 67 (13 November 2002); doi: 10.1117/12.469430
Post-Deadline Papers
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 414 (13 November 2002); doi: 10.1117/12.473342
LIGA, High Aspect Ratio Structuring
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 82 (13 November 2002); doi: 10.1117/12.469671
Packaging and Bonding
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 98 (13 November 2002); doi: 10.1117/12.469433
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 105 (13 November 2002); doi: 10.1117/12.469668
Fluidic MEMS
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 113 (13 November 2002); doi: 10.1117/12.469435
Materials
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 270 (13 November 2002); doi: 10.1117/12.469428
Measurement
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 126 (13 November 2002); doi: 10.1117/12.469431
Micromachining and Manipulation
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 135 (13 November 2002); doi: 10.1117/12.471927
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 146 (13 November 2002); doi: 10.1117/12.469427
Poster Session
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 302 (13 November 2002); doi: 10.1117/12.469434
Micromachining and Manipulation
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 159 (13 November 2002); doi: 10.1117/12.476090
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 168 (13 November 2002); doi: 10.1117/12.469672
Post-Deadline Papers
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 424 (13 November 2002); doi: 10.1117/12.476103
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 435 (13 November 2002); doi: 10.1117/12.473343
Nanotechnology I
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 1 (13 November 2002); doi: 10.1117/12.469676
Nanotechnology II
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 9 (13 November 2002); doi: 10.1117/12.471924
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 17 (13 November 2002); doi: 10.1117/12.476089
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 26 (13 November 2002); doi: 10.1117/12.476097
Poster Session
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 307 (13 November 2002); doi: 10.1117/12.469420
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 312 (13 November 2002); doi: 10.1117/12.469422
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 321 (13 November 2002); doi: 10.1117/12.469426
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 327 (13 November 2002); doi: 10.1117/12.469674
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 337 (13 November 2002); doi: 10.1117/12.469741
LIGA, High Aspect Ratio Structuring
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 93 (13 November 2002); doi: 10.1117/12.469743
Poster Session
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 345 (13 November 2002); doi: 10.1117/12.471923
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 349 (13 November 2002); doi: 10.1117/12.469746
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 356 (13 November 2002); doi: 10.1117/12.471926
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 365 (13 November 2002); doi: 10.1117/12.476088
Materials
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 285 (13 November 2002); doi: 10.1117/12.476091
Poster Session
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 373 (13 November 2002); doi: 10.1117/12.476092
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 381 (13 November 2002); doi: 10.1117/12.476093
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 387 (13 November 2002); doi: 10.1117/12.476098
Sensors
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 186 (13 November 2002); doi: 10.1117/12.476101
Poster Session
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 394 (13 November 2002); doi: 10.1117/12.476346
Micromachining and Manipulation
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 177 (13 November 2002); doi: 10.1117/12.476351
Post-Deadline Papers
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 446 (13 November 2002); doi: 10.1117/12.484270
Nanotechnology III
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 43 (13 November 2002); doi: 10.1117/12.484271
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 50 (13 November 2002); doi: 10.1117/12.484272
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 58 (13 November 2002); doi: 10.1117/12.469069
Micromachining and Manipulation
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 154 (13 November 2002); doi: 10.1117/12.486399
Measurement
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 119 (13 November 2002); doi: 10.1117/12.489851
Post-Deadline Papers
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 455 (13 November 2002); doi: 10.1117/12.499575
Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, pg 464 (13 November 2002); doi: 10.1117/12.499601
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