13 November 2002 An integrated biochip design and fabrication
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Abstract
Polymerase chain reaction (PCR) microvessel, capillary electrophoresis (CE) microchannel and impedance electrodes were integrated in a monolithic biochip. This paper reports on the detailed designs and fabrications of the PCR-CE-detector integrated biochip. The CE microchannel and PCR microvessel were fabricated with PDMS poured on a master made by SU-8 photoresist. The electrode plate was integrated with Au heater and temperature sensor for PCR amplification, electrodes for CE separation and impedance detection. The structure of the microfluidic channel was introduced and the impedance of microelectrodes on the chip was simulated.
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Zhan Zhao, Zhan Zhao, Dafu Cui, Dafu Cui, Shanhong Xia, Shanhong Xia, Zheng Cui, Zheng Cui, } "An integrated biochip design and fabrication", Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, (13 November 2002); doi: 10.1117/12.469426; https://doi.org/10.1117/12.469426
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