Development of position sensors for macro- and microelectronic devices

Alan L. Harvey; Liquian Qin; Ashraf Kadri; Ron Zmood

doi:10.1117/12.476093

13 November 2002 Development of position sensors for macro- and microelectronic devices

Alan L. Harvey, Liquian Qin, Ashraf Kadri, Ron Zmood

Proceedings Volume 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems; (2002) https://doi.org/10.1117/12.476093
Event: SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, 2002, Melbourne, Australia

Abstract

This paper discusses the development of position sensors for mechatronic applications. In particular, these sensors were developed for magnetic bearings which require position sensing of the rotor relative to the stator. Magnetic beaings are open loop unstable, and therefore, require closed loop control of rotor position to centrally position the rotor relative to the circular bearing stator. Therefore, the position sensors are required to have high sensitivities and good resolution. In addition, electro magnetic interference (EMI) rejection and drift need to be taken into account in designing or selecting sensors for magnetic bearings, as often the magnetic bearing is operating in an environment of strong electro magnetic fields. This paper discusses displacement measuring sensor system types and the performance of units developed for high speed rotating systems and micro-scale units for mm scale magnetic bearings. The reasons to choose a particular type of sensor are discussed and the performance of inductive sensors in particular are presented. The discussion will also focus on properties of sensing coils and signal conditioners for macro as well as micro magnetic bearings.

Citation Download Citation

Alan L. Harvey, Liquian Qin, Ashraf Kadri, and Ron Zmood "Development of position sensors for macro- and microelectronic devices", Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, (13 November 2002); https://doi.org/10.1117/12.476093

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