Fabrication of microfluidic device (diffuser or mixer) using aerosol deposition method

Jun Akedo; Maxim Lebedev

doi:10.1117/12.471922

13 November 2002 Fabrication of microfluidic devise (diffuser or mixer) using aerosol deposition method

Jun Akedo, Maxim Lebedev

Proceedings Volume 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems; (2002) https://doi.org/10.1117/12.471922
Event: SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, 2002, Melbourne, Australia

Abstract

Aerosol deposition method (ADM) is a high performance technique for fabricating of piezoelectric 1-100- micron- thick film on various kinds of substrate. High deposition rate (over 30 micron/min for area 5 mm × 5 mm), low process temperature (less than 600 °C) as well as micropatterning of PZT during deposition (without etching) are very attractive for MEMS, and micro-TAS applications. In this presentation, the performance of a Si diaphragm driven by PZT thick film deposited by ADM was investigated from the point of view of applications for micro-diffuser. To find optimum conditions of diffuser, 4 ~ 60-micron-thick PZT films were directly deposited onto 10 ~ 140-micron-thick Si substrate. Displacement of 65-micron-thick Si diaphragm ( 6 mm × 6 mm) driven by 14-micron-thick PZT film was 1.2 micron at 40 V ac at non-resonance frequency and was 24 micron at resonance of 22.4 kHz driven by 8 V. The influence of liquid loads on resonance frequency shift and fluidic follow were investigated as the first report.

Citation Download Citation

Jun Akedo and Maxim Lebedev "Fabrication of microfluidic devise (diffuser or mixer) using aerosol deposition method", Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, (13 November 2002); https://doi.org/10.1117/12.471922

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