13 November 2002 LCVD-grown micro carbon rod for MEMS applications: a study on the Raman spectroscopic characterization
Author Affiliations +
Abstract
We have fabricated micro carbon rod/needle structures of size 30 to 400 μm on graphite substrate by the pyrolytic decomposition of ethylene precursor gas using argon ion laser (514.5 nm) at different laser power and chamber pressure. The micro carbon rods were characterized using Raman spectroscopy and two broad peaks centered at 1320-1345 cm-1 and 1589-1602 cm-1 were observed, which corresponds to D (disorder) and G (graphitic) bands, respectively. LCVD grown micro carbon rods consists of highly polycrystalline graphite as well as amorphous carbon phase. The microstructural features of the LCVD grown micro carbon rods are discussed in detail.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jayaraman Senthil Selvan, Jayaraman Senthil Selvan, Sungho Jeong, Sungho Jeong, } "LCVD-grown micro carbon rod for MEMS applications: a study on the Raman spectroscopic characterization", Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, (13 November 2002); doi: 10.1117/12.476091; https://doi.org/10.1117/12.476091
PROCEEDINGS
8 PAGES


SHARE
Back to Top