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13 November 2002 Ti-Mo and Mo-W mixed oxides for gas sensing applications
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Abstract
Molybdenum trioxide - tungsten trioxide (MoO3-WO3) and titanium oxide - molybdenum oxide (TiO2-MoO3) binary metal oxide thin films have been prepared by the sol-gel process and by PVD. The films were deposited using the spin coating technique and by sputtering onto alumina substrates with interdigital electrodes. MoO3-WO3 film morphology is composed of MoO3 needle like grains and WO3 spherical grains when annealed at 450°C. MoO3-TiO2 film morphology consists of a well-developed crystal structure for the sol-gel film and a porous morphology for the sputtered films when annealed at 800°C. The films exhibited selective gas sensing characteristics at an operating temperature of 300°C towards nitrogen dioxide (NO2). The RF and SG fabricated MoO3-TiO2 possess different gas sensing properties attributed to the fabrication and resulting morphological difference of the thin films.
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Elisabetta Comini, Giorgio Sberveglieri, Kosmas Galatsis, and Wojtek Wlodarski "Ti-Mo and Mo-W mixed oxides for gas sensing applications", Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, (13 November 2002); https://doi.org/10.1117/12.476100
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