Silicon, silicon dioxide, glass and other key materials of micro system technology show an inhibiting effect on PCR. This negative influence becomes seriously, if devices are miniaturized, particularly in case of flow-through devices due to their high surface to volume ratio. In contrast, alkyl-substituted surfaces do not inhibit the reaction. Although the silanization improves the compatibility, the suppression of inhibition by wall surface treatment was not stable over longer time intervals. Therefore, the stability of chemical surface modifications was studied in dependence of silanization, material, pH, temperature and buffer composition. The efficiency of surface covering by molecular substitution was characterized by wetting experiments as well as by PCR test runs. The results show that the surface treatment can be optimized by the choice of silanization agents and the concentration of surface active additives.