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15 April 2003 Femtosecond-laser-induced refractive index modifications for fabrication of three-dimensional integrated optical devices
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Abstract
We present the fabrication of three-dimensional waveguide structures indide fused silica using the femtosecond laser direct-writing technique. The guiding properties of a produced 1x3 splitter are studied in detail. By appropriate choice of the processing parameters a multimode entrance port can be generated which allows to vary the splitting ratio by changing the input coupling. The processing requirements for such splitter devices will be discussed.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Matthias Will, Jonas Burghoff, Stefan Nolte, and Andreas Tuennermann "Femtosecond-laser-induced refractive index modifications for fabrication of three-dimensional integrated optical devices", Proc. SPIE 4941, Laser Micromachining for Optoelectronic Device Fabrication, (15 April 2003); https://doi.org/10.1117/12.468496
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