Laser micromachining of thin films for optoelectronic devices and packages

David F. Moore; John A. Williams; Matthew A. Hopcroft; Billy Boyle; Johnny H. He; Richard R. A. Syms

doi:10.1117/12.468490

15 April 2003 Laser micromachining of thin films for optoelectronic devices and packages

David F. Moore, John A. Williams, Matthew A. Hopcroft, Billy Boyle, Johnny H. He, Richard R. A. Syms

Proceedings Volume 4941, Laser Micromachining for Optoelectronic Device Fabrication; (2003) https://doi.org/10.1117/12.468490
Event: Photonics Fabrication Europe, 2002, Bruges, Belgium

Abstract

Focused laser micromachining in an optical microscope system is used to prototype packages for optoelectronic devices and to investigate new materials with potential applications in packaging. Micromachined thin fims are proposed as mechanical components to locate fibers and other optical and electrical components on opto-assemblies. This paper reports prototype structures which are micromachined in silicon carbide to produce beams 5 μm thick by (1) laser cutting a track in a SiC coated Si wafer, (2) undercutting by anisotropic silicon etching using KOH in water, and (3) trimming if necessary with the laser system. This approach has the advantage of fast turn around and proof of concept. Mechanical test data are obtained from the prototype SiC beam package structures by testing with a stylus profilometer. The Youngs modulus obtained for chemical vapor deposited silicon carbide is 360 +/- 50 GPa indicating that it is a promising material for packaging applications.

Citation Download Citation

David F. Moore, John A. Williams, Matthew A. Hopcroft, Billy Boyle, Johnny H. He, and Richard R. A. Syms "Laser micromachining of thin films for optoelectronic devices and packages", Proc. SPIE 4941, Laser Micromachining for Optoelectronic Device Fabrication, (15 April 2003); https://doi.org/10.1117/12.468490

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available