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15 April 2003 Micromachined fiber optic-to-Mach-Zehnder interferometer coupling via SiON channel waveguide
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Abstract
In this article we present a new micromachined platform for coupling the optical fibers to waveguides of Mach-Zehnder interferometers, supporting fibers in the same wafer as a waveguide wafer. Using standard CMOS technologies, like a UV photolithography, KOH wet etching of Si(100) wafer, sputtering of metal layers, RIE etching the fabrication of a very precise platform is demonstrated.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lukasz Nieradko, Christophe Gorecki, Andrei Sabac, and Jean Claude Jeannot "Micromachined fiber optic-to-Mach-Zehnder interferometer coupling via SiON channel waveguide", Proc. SPIE 4943, Fiber-based Component Fabrication, Testing, and Connectorization, (15 April 2003); https://doi.org/10.1117/12.468517
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