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Novel low-cost and simple fabrication technology for tunable dielectric active and passive optical air-gap devices
Interferometry system for the mechanical characterization of membranes with silicon oxynitride thin films fabricated by PECVD
Gripping tool for MEMS Assembly with an absolute distance measurement sensor using a fibre optic WL interferometer with high measuring frequency
Assessment of vacuum casting replication technology for refractive and diffractive micro-optomechanical components
Investigation of interfacial behavior of a Si-epoxy-FR4 structure under thermal testing using moire interferometry