Algorithmic solutions for thermal and electrostatic simulation of MEMS

Vladimir Szekely

doi:10.1117/12.472702

25 March 2003 Algorithmic solutions for thermal and electrostatic simulation of MEMS

Vladimir Szekely

Proceedings Volume 4945, MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly; (2003) https://doi.org/10.1117/12.472702
Event: Photonics Fabrication Europe, 2002, Bruges, Belgium

Abstract

This paper is dealing with the field simulation problems of MEMS structures. Both thermal and electro-static fields are considered. Two simulation algorithms are investigated in details: the Fourier transformation method applied to multi-layer structures and the successive node reduction algorithm belonging to the family of FDM methods. Extensions of these methods are discussed, e.g. the application of the Fourier method to mixed lateral boundary conditions and methods for physical level/network model level co-simulation.

Citation Download Citation

Vladimir Szekely "Algorithmic solutions for thermal and electrostatic simulation of MEMS", Proc. SPIE 4945, MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly, (25 March 2003); https://doi.org/10.1117/12.472702

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