25 March 2003 Arrays of spherical micromirrors and molded microlenses fabricated with bulk Si micromachining
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Abstract
We have extended the technology of fabrication of optical spherical mirrors by using single-mask bulk micromachining to fabricate highly-uniform spherical arrays of micro-mirrors and to mold polymer-on-glass microlenses. The arrays fabricated feature 100% optical fill factor and very high field uniformity of optical characteristics of individual micro-mirrors (lenses). The technology is specially suitable for the fabrication of uniform arrays of spherical mirrors with small numerical apertures for use in Hartmann-Shack wavefront sensors. Optical tests with the hexagonal array of molded microlenses with pitch of 300μm and focal length of ~30mm demonstrated that the contribution of microlens imperfections into the wavefront reconstruction error does not exceed λ/50 rms.
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Gleb V. Vdovin, Ourang Akhzar-Mehr, Pasqualina M. Sarro, Davies W. De Lima Monteiro, Mikhail Yu. Loktev, "Arrays of spherical micromirrors and molded microlenses fabricated with bulk Si micromachining", Proc. SPIE 4945, MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly, (25 March 2003); doi: 10.1117/12.471992; https://doi.org/10.1117/12.471992
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