Design, manufacture, and reliabilty of 2D MEMS optical switches

Peter M. De Dobbelaere; Steffen Gloeckner; Susant K. Patra; Li Fan; Charles King; Ken Falta

doi:10.1117/12.468414

25 March 2003 Design, manufacture and reliability of 2D MEMS optical switches

Peter M. De Dobbelaere, Steffen Gloeckner, Susant K. Patra, Li Fan, Charles King, Ken Falta

Author Affiliations +

Proceedings Volume 4945, MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly; (2003) https://doi.org/10.1117/12.468414
Event: Photonics Fabrication Europe, 2002, Bruges, Belgium

Abstract

Design, manufacture and reliability of 2D MEMS optical switches 2D Optical switches are an ideal solution for several optical switching applications in telecommunications including optical cross-connects, reconfigurable optical add-drop multiplexers and fiber-optic protection switching and monitoring. In this paper we address aspects of the design and manufacturing of 2D MEMS based optical switches. Important design areas such as MEMS, optics, packaging and optical performance are discussed. Reliability is an extremely important aspect for all devices used in telecom systems. We will address potential reliability issues as well as their resolution and verification.

Citation Download Citation

Peter M. De Dobbelaere, Steffen Gloeckner, Susant K. Patra, Li Fan, Charles King, and Ken Falta "Design, manufacture and reliability of 2D MEMS optical switches", Proc. SPIE 4945, MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly, (25 March 2003); https://doi.org/10.1117/12.468414

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