25 March 2003 Design, manufacture and reliability of 2D MEMS optical switches
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Abstract
Design, manufacture and reliability of 2D MEMS optical switches 2D Optical switches are an ideal solution for several optical switching applications in telecommunications including optical cross-connects, reconfigurable optical add-drop multiplexers and fiber-optic protection switching and monitoring. In this paper we address aspects of the design and manufacturing of 2D MEMS based optical switches. Important design areas such as MEMS, optics, packaging and optical performance are discussed. Reliability is an extremely important aspect for all devices used in telecom systems. We will address potential reliability issues as well as their resolution and verification.
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Peter M. De Dobbelaere, Peter M. De Dobbelaere, Steffen Gloeckner, Steffen Gloeckner, Susant K. Patra, Susant K. Patra, Li Fan, Li Fan, Charles King, Charles King, Ken Falta, Ken Falta, } "Design, manufacture and reliability of 2D MEMS optical switches", Proc. SPIE 4945, MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly, (25 March 2003); doi: 10.1117/12.468414; https://doi.org/10.1117/12.468414
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