25 March 2003 Gripping tool for MEMS Assembly with an absolute distance measurement sensor using a fibre optic WL interferometer with high measuring frequency
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Abstract
Reduction in the size of produced parts, increases the difficulty for precise manufacturing observation-processes and it makes manufacturing control cycles even more complex. Among all the production steps for micro-systems, assembly seems to be specially affected with this manufacturing handicap. Usual sensors used for the macro-world have to be modified or redesigned in order to address its use for the micro-world. This document presents the integration of a white light interferometer into a flexible fibre-scope used already for process monitoring purposes and which is mounted into a gripping-tool. The goal is to achieve a linear measurement between a gripping-tool and a target-part during the assembly process of hybrid micro systems.
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Tilo Pfeifer, Ubaldo Aleriano, Frank Depiereux, "Gripping tool for MEMS Assembly with an absolute distance measurement sensor using a fibre optic WL interferometer with high measuring frequency", Proc. SPIE 4945, MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly, (25 March 2003); doi: 10.1117/12.468417; https://doi.org/10.1117/12.468417
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