8 July 2003 Interferometric system with resolution better than coherence length for determination of geometrical thickness and refractive index of a layer object
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Abstract
The idea of a new low coherence interferometric system with axial resolution better than coherence length providing simultaneous measurement of the geometrical thickness and refractive index of transparent layers by sharp focusing of light on the measured object is considered. The presented interferometric system consists of two parts -- the so-called Wave Front Matching Interferometer (WFMI) and a low coherence Michelson interferometer (LCMI) as a light source for the first. The WFMI provides high separation of interference signal peaks from demarcations in layer object at high numerical aperture focusing of light on the object. The tandem optical scheme of these interferometers allows to make this system very compact and mobile.
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Dmitry V. Lyakin, Mickail I. Lobachev, Vladimir P. Ryabukho, Valery V. Tuchin, "Interferometric system with resolution better than coherence length for determination of geometrical thickness and refractive index of a layer object", Proc. SPIE 4956, Coherence Domain Optical Methods and Optical Coherence Tomography in Biomedicine VII, (8 July 2003); doi: 10.1117/12.477798; https://doi.org/10.1117/12.477798
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