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22 July 2003 Surface plasmon resonance sensor with silicon-based prism coupling
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Abstract
We study possibilities of implementation of Surface Plasmon Resonance (SPR) sensors on purely silicon platform, in which SPR-supporting Au film is used with a silicon prism in the Kretschmann-Raether geometry. Based on theoretical and experimental analyses we have determined the conditions and parameters of SPR excitations on such a platform in the infrared light for configurations of bio- and gas sensing. The approach enables one to apply well-developed silicon microfabrication and integration methods for SPR technique, opening up the possibilities to miniaturize SPR bio- and chemical sensors.
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Sergiy Patskovsky, Andrei V. Kabashin, Michel Meunier, and John H. T. Luong "Surface plasmon resonance sensor with silicon-based prism coupling", Proc. SPIE 4958, Advanced Biomedical and Clinical Diagnostic Systems, (22 July 2003); https://doi.org/10.1117/12.477863
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