22 July 2003 Toward massive parallel reading of sensitive mechanical microsensors
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Proceedings Volume 4958, Advanced Biomedical and Clinical Diagnostic Systems; (2003); doi: 10.1117/12.488680
Event: Biomedical Optics, 2003, San Jose, CA, United States
Abstract
We describe a new approach for the parallel reading of the response of micromechanical sensors in array using an interferential imaging method coupled with a multichannel lock-in detection. The mechanical response of each sensor is deduced from the image of their topography. The goal is the detection of stress changes through the measurement of induced topography changes between loaded sensors and reference sensors. A measurement of the out-of-plane displacement field is a sensitive and reliable method to determine the mechanical stress in microcantilevers. In this study gold-covered SiO2 cantilevers have been used as sensors and a displacement measurement sensitivity of 230 pm has been achieved with no averaging. Such a value is equivalent to a stress change sensitivity better than 0.001 MPa for our application. The fields of application extend from DNA biochips to environmental sensors.
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Fabien Amiot, Jean Paul Roger, Albert-Claude Boccara, "Toward massive parallel reading of sensitive mechanical microsensors", Proc. SPIE 4958, Advanced Biomedical and Clinical Diagnostic Systems, (22 July 2003); doi: 10.1117/12.488680; https://doi.org/10.1117/12.488680
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KEYWORDS
Sensors

Silica

Gold

Scanning electron microscopy

Microsensors

CCD image sensors

Interferometry

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