25 June 2003 Spatial coherence: comparison of interferometric and non-interferometric measurements
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Proceedings Volume 4969, Laser Resonators and Beam Control VI; (2003) https://doi.org/10.1117/12.499283
Event: High-Power Lasers and Applications, 2003, San Jose, CA, United States
Abstract
Coherence properties of real laser beams can be crucial for many applications, e.g. in lithographic processes or for Bragg grating writing. Knowledge of the coherence distribution together with the amplitude and phase distribution allows for a complete beam characterization, which enables the numerical simulation of beam propagation through virtually any relevant optical system. Classical measurement methods of coherence properties are Young’s double hole interferometry and Shear interferometry. But due to their interferometric nature experimental realization of both methods is quite difficult and obtainable accuracies are usually not satisfying. The reconstruction of the Wigner distribution from a couple of measured intensity distributions in the waist region of a beam provides a simple measurement setup delivering fairly accurate results. This is demonstrated by an experimental comparison of these three methods.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bernd Eppich, Guido Mann, Horst Weber, "Spatial coherence: comparison of interferometric and non-interferometric measurements", Proc. SPIE 4969, Laser Resonators and Beam Control VI, (25 June 2003); doi: 10.1117/12.499283; https://doi.org/10.1117/12.499283
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