17 October 2003 Holographic fabrication of micron structures using interfered femtoseond laser beams split by diffractive optics
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Proceedings Volume 4977, Photon Processing in Microelectronics and Photonics II; (2003) https://doi.org/10.1117/12.479546
Event: High-Power Lasers and Applications, 2003, San Jose, CA, United States
Abstract
A line of periodic dot structure was fabricated on and inside materials by laser-induced modification with interfered femtosecond laser beams split by a diffractive optics. In addition, dot matrix and comb structures were fabricated with transportation of a sample at arbitrary speeds. These structures worked as transmission and reflection gratings. In addition, nanowires were fabricated by peeling the comb structure. Dot matrix was also formed by a single shot of laser ablation with four interfering beams.
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Yoshiki Nakata, Yoshiki Nakata, Tatsuo Okada, Tatsuo Okada, Mitsuo Maeda, Mitsuo Maeda, } "Holographic fabrication of micron structures using interfered femtoseond laser beams split by diffractive optics", Proc. SPIE 4977, Photon Processing in Microelectronics and Photonics II, (17 October 2003); doi: 10.1117/12.479546; https://doi.org/10.1117/12.479546
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