17 October 2003 Laser-assisted nanofabrication
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Proceedings Volume 4977, Photon Processing in Microelectronics and Photonics II; (2003) https://doi.org/10.1117/12.479236
Event: High-Power Lasers and Applications, 2003, San Jose, CA, United States
Abstract
Laser assisted nanofabrication for surface nanopatterning is investigated. To overcome the limitation of light wavelength, pulsed lasers were applied to combine with atomic force microscope (AFM) and nanoparticle self-assembled mask to achieve sub-30 nm patterning on the metallic surfaces. The mechanisms of the formation of nanostructure patterns are discussed. Progress on numerical simulation and physical modeling of laser assisted nanofabrication has been demonstrated. The method of AFM tip or particle enhanced laser irradiation allows the study of field enhancement effects as well as its potential applications for nanolithography.
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Ming Hui Hong, Ming Hui Hong, Su Mei Huang, Su Mei Huang, Boris S. Luk'yanchuk, Boris S. Luk'yanchuk, Zeng Bo Wang, Zeng Bo Wang, Yong Feng Lu, Yong Feng Lu, Tow Chong Chong, Tow Chong Chong, } "Laser-assisted nanofabrication", Proc. SPIE 4977, Photon Processing in Microelectronics and Photonics II, (17 October 2003); doi: 10.1117/12.479236; https://doi.org/10.1117/12.479236
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