17 October 2003 Laser direct-write of metal patterns for interconnects and antennas
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Proceedings Volume 4977, Photon Processing in Microelectronics and Photonics II; (2003) https://doi.org/10.1117/12.479407
Event: High-Power Lasers and Applications, 2003, San Jose, CA, United States
Abstract
The use of direct-write techniques in the design and manufacture of interconnects and antennas offers some unique advantages for the development of next generation commercial and defense microelectronic systems. Using a laser forward transfer technique, we have demonstrated the ability to rapidly prototype interconnects and various antenna designs. This laser direct-write process is compatible with a broad class of materials such as metals and electronic ceramics and its capable of depositing patterns of any of these materials over non-planar surfaces in a conformal manner. The laser direct-write process is computer controlled so as to allow any given design to be easily modified and adapted to a particular application. To illustrate the potential of this technique, examples of metal lines on laser micromachined polyimide substrates for interconnect applications, are discussed and evaluated. In addition, examples of simple planar and conformal antennas are provided to demonstrate how this technique can influence current and future microelectronic device applications.
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Alberto Pique, Alberto Pique, Craig B. Arnold, Craig B. Arnold, Bhanu Pratap, Bhanu Pratap, Ray C. Y. Auyeung, Ray C. Y. Auyeung, Heung Soo Kim, Heung Soo Kim, David W. Weir, David W. Weir, } "Laser direct-write of metal patterns for interconnects and antennas", Proc. SPIE 4977, Photon Processing in Microelectronics and Photonics II, (17 October 2003); doi: 10.1117/12.479407; https://doi.org/10.1117/12.479407
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