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17 October 2003 Opportunities and challenges for laser technology in microelectronics and photonics
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Proceedings Volume 4977, Photon Processing in Microelectronics and Photonics II; (2003) https://doi.org/10.1117/12.478607
Event: High-Power Lasers and Applications, 2003, San Jose, CA, United States
Abstract
Industrial manufacturing with the aid of laser technology has found many applications in the microelectronics industry during the last three decades. At Philips the main application fields are laser spot welding and marking. Several novel fields are strongly coming up due to the high demands in the microelectronics and (flat) display industry that cannot be met with conventional technologies. In this paper we give an overview of the present status of laser technology in electronics manufacturing and of innovative developments for new applications in microelectronics and photonics.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Willem Hoving "Opportunities and challenges for laser technology in microelectronics and photonics", Proc. SPIE 4977, Photon Processing in Microelectronics and Photonics II, (17 October 2003); https://doi.org/10.1117/12.478607
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