17 October 2003 Thermal and fluid processes of a thin melt zone during femtosecond laser ablation of glass
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Proceedings Volume 4977, Photon Processing in Microelectronics and Photonics II; (2003) https://doi.org/10.1117/12.479527
Event: High-Power Lasers and Applications, 2003, San Jose, CA, United States
Abstract
Microfluidic channels on borosilicate glass are machined using femtosecond lasers. The morphology of the ablated surface is studied using scanning microscopy. The results show micron scale features inside the channels. The formation mechanism of these features is investigated by additional experiments accompanied by a theoretical analysis of the thermal and fluid processes involved in the ultrafast laser ablation process. These studies indicate the existence of a very thin melting zone on glass and suggest that the surface morphology is formed by the plasma pressure-driven fluid motion of the melting zone during the ablation process.
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Adela Ben-Yakar, Adela Ben-Yakar, Anthony Harkin, Anthony Harkin, Jacqueline Ashmore, Jacqueline Ashmore, Mengyan Shen, Mengyan Shen, Eric Mazur, Eric Mazur, Robert L. Byer, Robert L. Byer, Howard A. Stone, Howard A. Stone, } "Thermal and fluid processes of a thin melt zone during femtosecond laser ablation of glass", Proc. SPIE 4977, Photon Processing in Microelectronics and Photonics II, (17 October 2003); doi: 10.1117/12.479527; https://doi.org/10.1117/12.479527
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