19 June 2003 Fabrication of three-dimensional photonics devices using femtosecond laser pulses
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Proceedings Volume 4978, Commercial and Biomedical Applications of Ultrafast Lasers III; (2003) https://doi.org/10.1117/12.478598
Event: High-Power Lasers and Applications, 2003, San Jose, CA, United States
Abstract
Localized structural and refractive index modifications can be generated inside transparent solids by using focused ultrashort laser pulses, which allows for example the fabrication of optical waveguides. In this paper we present the fabrication of true three-dimensional integrated optical devices. The optical properties of the produced 3D structures as well as processing details and requirements on the positioning accuracy will be discussed. The experimental results will be compared with beam propagation simulations and limitations of this technique will be evaluated.
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Matthias Will, Jonas Burghoff, Stefan Nolte, Andreas Tünnermann, "Fabrication of three-dimensional photonics devices using femtosecond laser pulses", Proc. SPIE 4978, Commercial and Biomedical Applications of Ultrafast Lasers III, (19 June 2003); doi: 10.1117/12.478598; https://doi.org/10.1117/12.478598
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