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Chemical mechanical planarization: an effective microfabrication and micromachining technology for MEMS
Novel MEMS technology based silicon and polymer hybrid actuator and applications as a tunable filter in telecom and in IR chemical detector
Fabrication of planar grating by direct ablation using ultrashort pulse laser with a novel optical configuration
Application of the technology of the excimer laser etching to fabricate the three-dimensional microstructures
Process conditions and lithographic performance of arch durimide polyimides in the ultra-thick film regime
Microstructure and mechanical properties of nickel microparts electroformed in replicated LIGA molds
High-aspect ratio microfabrication of crosslinked polytetrafluoroethylene using synchrotron radiation direct photo-etching