Microfabrication services at INO

Christine Alain; Hubert Jerominek; Patrice A. Topart; Timothy D. Pope; Francis Picard; Felix Cayer; Carl Larouche; Sebastien Leclair; Bruno Tremblay

doi:10.1117/12.472738

15 January 2003 Microfabrication services at INO

Christine Alain, Hubert Jerominek, Patrice A. Topart, Timothy D. Pope, Francis Picard, Felix Cayer, Carl Larouche, Sebastien Leclair, Bruno Tremblay

Author Affiliations +

Proceedings Volume 4979, Micromachining and Microfabrication Process Technology VIII; (2003) https://doi.org/10.1117/12.472738
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

MEMS (Micro Electro Mechanical Systems) technology has expanded widely over the last decade in terms of its use in devices and instrumentation for diverse applications. However, access to versatile foundry services for MEMS fabrication is still limited. At INO, the presence of a multidisciplinary team and a complete tool set allow us to offer unique MEMS foundry-type services. These services include: design, prototyping, fabrication, packaging and testing of various MEMS and MOEMS devices. The design of a device starts with the evaluation of different structures adapted to a given application. Computer simulation tools, like IntelliSuite, ANSYS or custom software are used to evaluate the mechanical, optical, thermal and electromechanical performances. Standard IC manufacturing techniques such as metal, dielectric and semiconductor film deposition and etching as well as photolithographic pattern transfer are available. In addition, some unique techniques such as on-wafer lithography by laser writing, gray-scale mask lithography, thick photoresist lithography, selective electroplating, injection moulding and UV-assisted moulding are available to customers. The hermetic packaging and a novel patented wafer-level micropackaging are also applied. This multifaceted expertise has been utilized to manufacturing of several types of MEMS devices as well as complex instruments including micromirror-type devices, microfilters, IR microbolometric detector arrays, complete cameras and multipurpose sensors.

Citation Download Citation

Christine Alain, Hubert Jerominek, Patrice A. Topart, Timothy D. Pope, Francis Picard, Felix Cayer, Carl Larouche, Sebastien Leclair, and Bruno Tremblay "Microfabrication services at INO", Proc. SPIE 4979, Micromachining and Microfabrication Process Technology VIII, (15 January 2003); https://doi.org/10.1117/12.472738

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available