15 January 2003 Micromolding and sintering of nanoparticle preforms into microparts
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Proceedings Volume 4979, Micromachining and Microfabrication Process Technology VIII; (2003) https://doi.org/10.1117/12.472736
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States
Abstract
A new replication technology that produces, high aspect ratio ceramic or metal microparts by micromolding and sintering nanoparticle preforms is presented. In this LIGA replication technique, an epoxy based nanoparticle slurry is cast into sacrificial plastic micromolds produced by injection molding. The epoxy is allowed to cure and, if desired, excess epoxy is polished off to produce individual micropart preforms. The micromold is then dissolved in methylene chloride and the micropart preforms are sintered in either air (oxide ceramics) or 4% hydrogen in argon (nickel). This presentation will discuss the effects of the epoxy formulation, the microcasting procedure, and the sintering schedule on the materials properties of the final sintered microparts. It will be shown that this replication technique produces ceramic or metal microparts with micron size features and mechanical properties comparable to those of macroscopic materials.
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Alfredo M. Morales, Terry J. Garino, Bradley L. Boyce, Linda A. Domeier, Anne K. Gutmann, Dorrance E. McLean, "Micromolding and sintering of nanoparticle preforms into microparts", Proc. SPIE 4979, Micromachining and Microfabrication Process Technology VIII, (15 January 2003); doi: 10.1117/12.472736; https://doi.org/10.1117/12.472736
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