16 January 2003 Dynamic MEMS devices for multi-axial fatigue and elastic modulus measurement
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Proceedings Volume 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II; (2003); doi: 10.1117/12.476332
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States
Abstract
For reliable MEMS device fabrication and operation, there is a continued demand for precise characterization of materials at the micron scale. This paper presents a novel material characterization device for fatigue lifetime testing. The fatigue specimen is subjected to multi-axial loading, which is typical of most MEMS devices. Polycrystalline silicon (polysilicon) fatigue devices were fabricated using the MUMPS process with a three layer mask process ground plane, anchor, and structural layer of polysilicon. A fatigue device consists of two or three beams, attached to a rotating ring and anchored to the substrate on each end. In order to generate a sufficiently large stress, the fatigue devices were tested in resonance to produce a von Mises equivalent stress as high as 1 GPa, which is in the fracture strength range reported for polysilicon. A further increase of the stress in the beam specimens was obtained by introducing a notch with a focused ion beam. The notch resulted into a stress concentration factor of about 3.8, thereby producing maximum von Mises equivalent stress in the range of 1 through 4 GPa. This study provides insight into multi-axial fatigue testing under typical MEMS conditions and additional information about micron-scale polysilicon mechanical behavior, which is the current basic building material for MEMS devices.
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Carolyn D. White, Rui Xu, Xiaotian Sun, Kyriakos Komvopoulos, "Dynamic MEMS devices for multi-axial fatigue and elastic modulus measurement", Proc. SPIE 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II, (16 January 2003); doi: 10.1117/12.476332; https://doi.org/10.1117/12.476332
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KEYWORDS
Microelectromechanical systems

Resonators

Scanning electron microscopy

Photomicroscopy

Material characterization

Nonlinear response

Silicon

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