16 January 2003 Micro-/nanoscale tribology and mechanics of MEMS/NEMS materials, lubricants and devices
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Proceedings Volume 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II; (2003); doi: 10.1117/12.476353
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States
Abstract
The field of MEMS/NEMS has expanded considerably over the last decade. The length scale and large surface-to-volume ratio of the devices result in very high retarding forces such as adhesion and friction that seriously undermine the performance and reliability of the devices. These tribological phenomena need to be studied and understood at the micro- to nanoscales. In addition, materials for MEMS/NEMS must exhibit good microscale tribological properties. There is a need to develop lubricants and identify lubrication methods that are suitable for MEMS/NEMS. Using atomic force microscopy-based techniques, researchers have conducted micro/nanotribological studies of materials and lubricants for use in MEMS/NEMS devices. In addition, component level testing have also been carried out to aid in better understanding of the observed tribological phenomena in MEMS/NEMS.
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Bharat Bhushan, "Micro-/nanoscale tribology and mechanics of MEMS/NEMS materials, lubricants and devices", Proc. SPIE 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II, (16 January 2003); doi: 10.1117/12.476353; https://doi.org/10.1117/12.476353
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KEYWORDS
Silicon

Humidity

Molecules

Silicon carbide

Adhesives

Self-assembled monolayers

Microelectromechanical systems

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