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Emerging leadership of surface micromachined MEMS for wavelength switching in telecommunications systems
Computational Design and Analysis of a Microtab Based Aerodynamic Loads Control System for Lifting Surfaces
Monocrystalline Si membranes for pressure sensors fabricated by a novel surface micromachining process using porous silicon
Electrostatic beam actuator for switching applications fabricated by Ni-microelectroplating and thermal postprocessing
Design and fabrication of a large vertical travel silicon inchworm microactuator for the Advanced Segmented Silicon Space Telescope
Electrostatic actuators and tunable micro capacitors/switches with expanded tuning range due to intrinsic stress gradients
Design and characterization of micro-inertia switches fabricated using low-temperature metal-electroplating technology