16 January 2003 Emerging leadership of surface micromachined MEMS for wavelength switching in telecommunications systems
Author Affiliations +
Abstract
We introduce the Network Photonics’ CrossWave as the first commercially-available, MEMS-based wavelength selective switch. The CrossWave combines the functionality of signal de-multiplexing, switching and re-multiplexing in a single all-optical operation using a dispersive element and 1-D MEMS. 1-D MEMS, where micromirrors are configured in a single array with a single mirror per wavelength, are fabricated in a standard surface micromachining process. In this paper we present three generations of micromirror designs. With proper design optimization and process improvements we have demonstrated exceptional mirror flatness (<16.2m-1 curvature), surface error (
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bevan D. Staple, Lilac Muller, David C. Miller, "Emerging leadership of surface micromachined MEMS for wavelength switching in telecommunications systems", Proc. SPIE 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (16 January 2003); doi: 10.1117/12.472873; https://doi.org/10.1117/12.472873
PROCEEDINGS
9 PAGES


SHARE
RELATED CONTENT


Back to Top