16 January 2003 Emerging leadership of surface micromachined MEMS for wavelength switching in telecommunications systems
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Abstract
We introduce the Network Photonics’ CrossWave as the first commercially-available, MEMS-based wavelength selective switch. The CrossWave combines the functionality of signal de-multiplexing, switching and re-multiplexing in a single all-optical operation using a dispersive element and 1-D MEMS. 1-D MEMS, where micromirrors are configured in a single array with a single mirror per wavelength, are fabricated in a standard surface micromachining process. In this paper we present three generations of micromirror designs. With proper design optimization and process improvements we have demonstrated exceptional mirror flatness (<16.2m-1 curvature), surface error (
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Bevan D. Staple, Bevan D. Staple, Lilac Muller, Lilac Muller, David C. Miller, David C. Miller, } "Emerging leadership of surface micromachined MEMS for wavelength switching in telecommunications systems", Proc. SPIE 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (16 January 2003); doi: 10.1117/12.472873; https://doi.org/10.1117/12.472873
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