RF MEMS compiler: automatic design synthesizer for passive MEMS wireless components

Bachar Affour; Patrick Giroud; Firas Mohamed

doi:10.1117/12.476284

16 January 2003 RF MEMS compiler: automatic design synthesizer for passive MEMS wireless components

Bachar Affour, Patrick Giroud, Firas Mohamed

Proceedings Volume 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II; (2003) https://doi.org/10.1117/12.476284
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

RF-MEMS Compiler uses a component synthesis approach instead of the more traditional analysis approach. It starts from system designer requirements and creates, in a one-click operation, a ready-to-fabricate layout and a passive equivalent SPICE circuit (when relevant). This methodology shortcuts the trial and error procedure which is long, difficult, and offers no guarantee of obtaining the targeted performances. Furthermore, no single designer typically has the skills needed to effectively carry out these tasks. As demonstrated in the case of inductors, the approach can be easily generalized to any RF-MEMS component fabricated through a predefined process. First results are very promising. The inductor compiler lost no more than 5% accuracy compared to the equivalent circuit and produced no more than 11% dispersion of the generated geometry.

Citation Download Citation

Bachar Affour, Patrick Giroud, and Firas Mohamed "RF MEMS compiler: automatic design synthesizer for passive MEMS wireless components", Proc. SPIE 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (16 January 2003); https://doi.org/10.1117/12.476284

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