16 January 2003 Tapered-width micro-cantilever for pull-in voltage control
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Abstract
Novel tapered-width micro-cantilevers are introduced to give more design parameters in design space for controlling and synthesizing their pull-in (actuation) voltages. For a given fabrication process, the pull-in voltage of a micro-cantilever is generally a function of the taper function of width along the length, its initial width, and its length. By controlling these design parameters, a specific pull-in voltage for a micro-cantilever can be obtained. Three types of taper functions, linear, parabolic, and exponential, were selected as the width taper functions of micro-cantilevers in this study. Pull-in voltage as low as 1V is achieved with a fast growing taper function for a micro-cantilever. From the simulation and measurement results it shows that a micro-cantilever with a fast growing width along the length has a smaller pull-in voltage but occupies more area and has a smaller bandwidth.
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Chieh-Hsiao Wang, Chieh-Hsiao Wang, Robert J. Weber, Robert J. Weber, } "Tapered-width micro-cantilever for pull-in voltage control", Proc. SPIE 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (16 January 2003); doi: 10.1117/12.476283; https://doi.org/10.1117/12.476283
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