17 January 2003 Active silicon support for DNA diagnostics
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Proceedings Volume 4982, Microfluidics, BioMEMS, and Medical Microsystems; (2003) https://doi.org/10.1117/12.472735
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States
Abstract
Heated liquid cavities have been studied. Microlitre scale liquid cavities were etched to the surface of a silicon wafer. Liquid cavities were sealed with a glass cover. Integration of active components to the silicon support is also possible. A heater and a thermistor element are integrated into the silicon support. A pole structure was used within the wells for thermal optimization and self-feeding. The pole structure increases the surface area between silicon and liquid, which enhances thermal transport between silicon and liquid. The temperature of the water is also more uniform. The pole structure also makes the liquid cavity semiporous, enabling the self-feeding of samples due to capillary force. Active silicon support could be used in diagnostics and in biotechnology. Silicon supports were tested in PCR (Polymerace Chain Reaction). The construction of the temperature controlling setup for the silicon support is described. Temperature controlling setup is an independent measuring setup. Interface to the silicon support is made with a printed board to a microscope glass slide format. It is possible to use the printed board interface in a microarray reader. The contruction of a fluorescence measurement setup based on a microarray reader is described.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ari Petteri Hokkanen, Joona Koponen, Kai Kolari, Ingmar Stuns, "Active silicon support for DNA diagnostics", Proc. SPIE 4982, Microfluidics, BioMEMS, and Medical Microsystems, (17 January 2003); doi: 10.1117/12.472735; https://doi.org/10.1117/12.472735
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