Translator Disclaimer
17 January 2003 Investigation of hard magnetic silicone elastomer thin films
Author Affiliations +
Proceedings Volume 4982, Microfluidics, BioMEMS, and Medical Microsystems; (2003) https://doi.org/10.1117/12.478159
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States
Abstract
The hard magnetic materials with a high remnant magnetic moment, Mr, have the unique advantages that can achieve bi-directional (push-pull) movement in an external magnetic field. This paper presents the results on fabrication and testing of the novel hard magnetic silicone elastomer thin films. The micro-size hard ferrite powder, NdFeB powder and different silicone elastomers have been used to fabricate the various large elongation hard magnetic thin films. The uniform thin films range from 40 μm to 216 μm and they are successfully fabricated. Three different fabrication processing have been investigated and the mechanical properties, like Young’s modulus and deflection force, have been evaluated. The simulation results with ANSYS match the experimental data. In comparison to electrostatic or piezoelectric actuation, the magnetic actuation can provide stronger forces and larger deflections. The large elongation hard magnetic thin film provides an excellent diaphragm material, which plays an important role in the micro pump or valve. This film movement has been tested in the external magnetic field, and proved to have large deflections and high performances.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhongmei Yao, Ji Fang, Jackie C. Chen, and Weisong Wang "Investigation of hard magnetic silicone elastomer thin films", Proc. SPIE 4982, Microfluidics, BioMEMS, and Medical Microsystems, (17 January 2003); https://doi.org/10.1117/12.478159
PROCEEDINGS
10 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT


Back to Top