17 January 2003 Laser-based fabrication of microfluidic components and systems
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Proceedings Volume 4982, Microfluidics, BioMEMS, and Medical Microsystems; (2003) https://doi.org/10.1117/12.478144
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States
Abstract
Diffuser micro-pumps are commonly fabricated with the standard lithography techniques using silicon as the base material. The important components of this kind of micro-pump are flow directing diffusers and a moving diaphragm. Different diffuser designs show various flow rates and pump efficiency. In this work, polymer is used as its base material instead of silicon. Polymer is cost-effective and relatively easy to be machined with an Excimer laser. Moreover, the flexibility of the material gives a much better performance compared with the silicon based micro-pumps. The measured flow rate of this pump is 10 to 20 times higher than that of the silicon based micro-pumps. In addition, the performance of the diffuser polymer micro-pump is simulated with FLUENT and the calculated result at low frequency is in good agreement with the experimental result.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Joohan Kim, Xianfan Xu, "Laser-based fabrication of microfluidic components and systems", Proc. SPIE 4982, Microfluidics, BioMEMS, and Medical Microsystems, (17 January 2003); doi: 10.1117/12.478144; https://doi.org/10.1117/12.478144
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